Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator

Marc Jobin; Philippe Passeraub; Raphael Foschia

doi:10.1117/12.662868

28 April 2006 Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator

Marc Jobin, Philippe Passeraub, Raphael Foschia

Author Affiliations +

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 61880T (2006) https://doi.org/10.1117/12.662868
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

We show the integration of a home-made interference optical microscope (IOM) with an Atomic force microscope, as well as the combination of IOM with a nanoindentor. Such combined instruments have many applications in the characterisation of MEMS/NEMS. As an illustrative example, we have used a MEMS accelerometer with capacitive read-out. Surface topography and defects have been measured with an IOM/AFM setup, as well as the bending and the torsion of the inertial mass while a calibrated force is applied with the nanoindentor probe on an off-axis location of the inertial mass.

Citation Download Citation

Marc Jobin, Philippe Passeraub, and Raphael Foschia "Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880T (28 April 2006); https://doi.org/10.1117/12.662868

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