An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro-actuators

Guchuan Zhu; Jean-François Chianetta; Mehran Hosseini; Yves-Alain Peter

doi:10.1117/12.692301

12 October 2006 An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro-actuators

Guchuan Zhu, Jean-François Chianetta, Mehran Hosseini, Yves-Alain Peter

Author Affiliations +

Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 63740V (2006) https://doi.org/10.1117/12.692301
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

This paper extends the modeling of the effect of fringing field, proposed in our recent work, to more generic devices: electrostatic parallel-plate actuators with deformations. Though these devices can be model as two parallel capacitors with a variable factor depending on the displacement, it is difficult to determine the analytical expression of such a function. It is shown that, like the effect of fringing field, the modeling error of the effective actuator due to deformations can be compensated by introducing a variable serial capacitor. When a suitable robust control is used, the full knowledge of the introduced serial capacitor is not required, but merely its boundaries of variation. Based on this model, a robust control scheme is constructed using the theory of input-to-state stability (ISS) and backstepping state feedback design. This method allows loosening the stringent requirements on modeling accuracy without compromising the performance. The stability and the performance of the system using this control scheme are demonstrated through both stability analysis and numerical simulation.

Citation Download Citation

Guchuan Zhu, Jean-François Chianetta, Mehran Hosseini, and Yves-Alain Peter "An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro-actuators", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740V (12 October 2006); https://doi.org/10.1117/12.692301

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