Modeling distributed electrostatic effects in silicon microphones and their impact on the performance

Thomas Kuenzig; Gabriele Schrag; Alfons Dehé; Gerhard Wachutka

doi:10.1117/12.2180898

21 May 2015 Modeling distributed electrostatic effects in silicon microphones and their impact on the performance

Thomas Kuenzig, Gabriele Schrag, Alfons Dehé, Gerhard Wachutka

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95171L (2015) https://doi.org/10.1117/12.2180898
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

We present a system-level model for fast and efficient investigations of distributed electrostatic effects in state-of-the-art silicon microphones. Combining lumped and distributed submodels it accounts for electrostatic forces and capacitive read-out, including non-linearities, fringing fields and parasitics. The derived model is calibrated using electrostatic finite element (FE) simulations and validated by measurements. The non-linearities caused by electrostatic effects have a decisive impact on the sensitivity of the microphone and the distortion of the transduced acoustical signal. Hence, the proposed model provides important insights into the operation of the device, which can be employed to optimize the microphone characteristics.

Citation Download Citation

Thomas Kuenzig, Gabriele Schrag, Alfons Dehé, and Gerhard Wachutka "Modeling distributed electrostatic effects in silicon microphones and their impact on the performance", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95171L (21 May 2015); https://doi.org/10.1117/12.2180898

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