The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates

Clarence Chui; Philip D. Floyd; David Heald; Brian Arbuckle; Alan Lewis; Manish Kothari; Bill Cummings; Lauren Palmateer; Jan Bos; Daniel Chang; Jedi Chiang; Li-Ming Wang; Edmon Pao; Fritz Su; Vincent Huang; Wen-Jian Lin; Wen-Chung Tang; Jia-Jiun Yeh; Chen-Chun Chan; Fang-Ann Shu; Yuh-Diing Ju

doi:10.1117/12.713949

22 January 2007 The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates

Clarence Chui, Philip D. Floyd, David Heald, Brian Arbuckle, Alan Lewis, Manish Kothari, Bill Cummings, Lauren Palmateer, Jan Bos, Daniel Chang, Jedi Chiang, Li-Ming Wang, Edmon Pao, Fritz Su, Vincent Huang, Wen-Jian Lin, Wen-Chung Tang, Jia-Jiun Yeh, Chen-Chun Chan, Fang-Ann Shu, Yuh-Diing Ju

Author Affiliations +

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 646609 (2007) https://doi.org/10.1117/12.713949
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

QUALCOMM has developed and transferred to manufacturing iMoD displays, a MEMS-based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales up to enable fabrication on flat-panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.

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Clarence Chui, Philip D. Floyd, David Heald, Brian Arbuckle, Alan Lewis, Manish Kothari, Bill Cummings, Lauren Palmateer, Jan Bos, Daniel Chang, Jedi Chiang, Li-Ming Wang, Edmon Pao, Fritz Su, Vincent Huang, Wen-Jian Lin, Wen-Chung Tang, Jia-Jiun Yeh, Chen-Chun Chan, Fang-Ann Shu, and Yuh-Diing Ju "The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 646609 (22 January 2007); https://doi.org/10.1117/12.713949

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