Clarence Chui, Philip Floyd, David Heald, Brian Arbuckle, Alan Lewis, Manish Kothari, Bill Cummings, Lauren Palmateer, Jan Bos, Daniel Chang, Jedi Chiang, Li-Ming Wang, Edmon Pao, Fritz Su, Vincent Huang, Wen-Jian Lin, Wen-Chung Tang, Jia-Jiun Yeh, Chen-Chun Chan, Fang-Ann Shu, Yuh-Diing Ju
QUALCOMM has developed and transferred to manufacturing iMoD displays, a MEMS-based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales up to enable fabrication on flat-panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.
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