High-speed three-dimensional endoscopic OCT using MEMS technology

Zhongping Chen; Woonggyu Jung; Yeh-Chan Ahn; Ali Sepehr; William B. Armstrong; Matt Brenner; Daniel T. McCormick; Norman C. Tien

doi:10.1117/12.713950

22 January 2007 High-speed three-dimensional endoscopic OCT using MEMS technology

Zhongping Chen, Woonggyu Jung, Yeh-Chan Ahn, Ali Sepehr, William B. Armstrong, Matt Brenner, Daniel T. McCormick, Norman C. Tien

Author Affiliations +

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 64660H (2007) https://doi.org/10.1117/12.713950
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

We present a three-dimensional (3-D) endoscopic optical coherence tomography (OCT) system using a dual axis scanning mirror. The MEMS device employed in this study utilized a 1.2 mm mirror and exhibited x and y-axis resonant frequencies greater than 1 kHz. The developed probe was packaged and integrated with an OCT system which has a scan rate of 3~8 frames/s. Preliminary in vivo and in vitro 3-D OCT images of biological tissue, such as human finger, vocal cord, rabbit trachea, were visualized to verify the achieved performance of the device.

Citation Download Citation

Zhongping Chen, Woonggyu Jung, Yeh-Chan Ahn, Ali Sepehr, William B. Armstrong, Matt Brenner, Daniel T. McCormick, and Norman C. Tien "High-speed three-dimensional endoscopic OCT using MEMS technology", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660H (22 January 2007); https://doi.org/10.1117/12.713950

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