High-speed AFM probe with micromachined membrane tip

Byungki Kim; Byung Hyung Kwak; Faize Jamil

doi:10.1117/12.795050

28 August 2008 High-speed AFM probe with micromachined membrane tip

Byungki Kim, Byung Hyung Kwak, Faize Jamil

Proceedings Volume 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II; 704204 (2008) https://doi.org/10.1117/12.795050
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

This paper presents a micromachined silicon membrane type AFM tip designed to move nearly 1µm by electrostatic force. Since the tip can be vibrated in small amplitude with AC voltage input and can be displaced up to 1μm by DC voltage input, an additional piezo actuator is not required for scanning of submicron features. The micromachined membrane tips are designed to have 100 kHz ~ 1 MHz resonant frequency. Displacement of the membrane tip is measured by an optical interferometer using a micromachined diffraction grating on a quartz wafer which is positioned behind the membrane tip.

Citation Download Citation

Byungki Kim, Byung Hyung Kwak, and Faize Jamil "High-speed AFM probe with micromachined membrane tip", Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704204 (28 August 2008); https://doi.org/10.1117/12.795050

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