Paper
30 December 2008 Rapid prototyping of microfluidic devices using imprinting: application to microvalves and micropumps
Adrian J. Keating, Michael Gager, Donald Clarke
Author Affiliations +
Proceedings Volume 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV; 72690X (2008) https://doi.org/10.1117/12.810669
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia
Abstract
A method to create microfluidic devices by utilizing hot imprinting stamps formed using printed circuit boards is demonstrated. Very large microfluidic devices (15×15 cm2) can be created with lateral features down to 100 microns and depths of nominally 17-70 μm. Room temperature solvent bonding was found to be a simple method of sealing the channels. The work also decribes the fabriation and operation of thermally actuated microvalves with sub-second switching and micropumps based on the imprinting techniques described.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Adrian J. Keating, Michael Gager, and Donald Clarke "Rapid prototyping of microfluidic devices using imprinting: application to microvalves and micropumps", Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 72690X (30 December 2008); https://doi.org/10.1117/12.810669
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Cited by 1 scholarly publication.
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KEYWORDS
Polymethylmethacrylate

Microfluidics

Copper

Surface roughness

Polishing

Temperature metrology

Etching

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