Fabrication of polymer waveguide devices for sensor applications

Mu Cheng; Jussi Hiltunen; Meng Wang; Antti Suutala; Pentti Karioja; Risto Myllylä

doi:10.1117/12.871119

24 November 2010 Fabrication of polymer waveguide devices for sensor applications

Mu Cheng, Jussi Hiltunen, Meng Wang, Antti Suutala, Pentti Karioja, Risto Myllylä

Proceedings Volume 7376, Laser Applications in Life Sciences; 73761A (2010) https://doi.org/10.1117/12.871119
Event: Laser Applications in Life Sciences 2010, 2010, Oulu, Finland

Abstract

The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.

Citation Download Citation

Mu Cheng, Jussi Hiltunen, Meng Wang, Antti Suutala, Pentti Karioja, and Risto Myllylä "Fabrication of polymer waveguide devices for sensor applications", Proc. SPIE 7376, Laser Applications in Life Sciences, 73761A (24 November 2010); https://doi.org/10.1117/12.871119

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