Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers

A. Ababneh; A. N. Al-Omari; H. C. Qiu; T. Manzaneque; J. Hernando; J. L. Sánchez-Rojas; A. Bittner; U. Schmid; H. Seidel

doi:10.1117/12.2017353

17 May 2013 Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers

A. Ababneh, A. N. Al-Omari, H. C. Qiu, T. Manzaneque, J. Hernando, J. L. Sánchez-Rojas, A. Bittner, U. Schmid, H. Seidel

Author Affiliations +

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 876334 (2013) https://doi.org/10.1117/12.2017353
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

In this work, the fabrication process of piezoelectric AlN cantilevers is presented. The cantilevers were electrically characterized in a vacuum chamber offering the possibility to close-loop control the back pressure from atmospheric conditions down to 5x10^-3 mbar. The quality factor (Q factor) is an important figure of merit to evaluate the performance of micro-resonators. In particular, two different modes were detected and analyzed. The first bending mode detected at 19.5 kHz has a quality factor of 470 at atmospheric pressure which increases continuously to 985 at 1x10^-1 mbar. The corresponding resonant frequency shifted from 19.500 kHz at atmospheric pressure to 19.573 kHz at 5 mbar. Below this pressure level, the resonance frequency stays unaffected within the measurement accuracy. The second bending mode detected at 117.264 kHz exhibits a quality factor of about 570 at atmospheric pressure increasing continuously to 1275 at 1x10^-1 mbar. In agreement with the other resonant frequency under investigation the corresponding resonant frequency decreased from 117.264 kHz at atmospheric pressure to 117.630 kHz at 5 mbar.

Citation Download Citation

A. Ababneh, A. N. Al-Omari, H. C. Qiu, T. Manzaneque, J. Hernando, J. L. Sánchez-Rojas, A. Bittner, U. Schmid, and H. Seidel "Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 876334 (17 May 2013); https://doi.org/10.1117/12.2017353

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available