Extracting of removal function in CCOS based on edge detection algorithm

Jian Liu; Shaozhi Wang; Linghua Zhang; Huanan Chen

doi:10.1117/12.2034331

30 August 2013 Extracting of removal function in CCOS based on edge detection algorithm

Jian Liu, Shaozhi Wang, Linghua Zhang, Huanan Chen

Proceedings Volume 8910, International Symposium on Photoelectronic Detection and Imaging 2013: Imaging Spectrometer Technologies and Applications; 89101D (2013) https://doi.org/10.1117/12.2034331
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China

Abstract

In order to realize removal function model building with high precision in computer controlled optical polishing process, a kind of new algorithm is proposed in this paper, which was based on edge detection technology. The algorithm preprocesses the interferometric metrology result and inverts it into digital image data at first. And then the Canny edge detecting operator and Hough transform are used to detect and extract the image edge. At last the boundary of the removal function was acquired. The center of removal function boundary was allocated quickly in this algorithm, which was assisted with the particularly center position. It reduced a lot of blind calculation for the target center of circle accumulating counts. At last, the experiment result indicated the algorithm in this paper could be used in removal function modeling and dwell time optimization solving.

Citation Download Citation

Jian Liu, Shaozhi Wang, Linghua Zhang, and Huanan Chen "Extracting of removal function in CCOS based on edge detection algorithm", Proc. SPIE 8910, International Symposium on Photoelectronic Detection and Imaging 2013: Imaging Spectrometer Technologies and Applications, 89101D (30 August 2013); https://doi.org/10.1117/12.2034331

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