Rapid prototyping of coupled photonic cavities by focused ion beam/photolithography hybrid technique

Jaime Viegas; Peng Xing

doi:10.1117/12.2040270

7 March 2014 Rapid prototyping of coupled photonic cavities by focused ion beam/photolithography hybrid technique

Jaime Viegas, Peng Xing

Proceedings Volume 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII; 89740H (2014) https://doi.org/10.1117/12.2040270
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Hybrid photolithography and focused ion beam (FIB) patterning of coupled photonic cavities is reported. This technique is used for rapid prototyping of nanophotonic devices, where previously mass-produced devices by conventional lithography steps, such as photolithography, projection lithography or nano/micro-imprinting can be customized by a versatile approach on a focused ion beam microscope. This requires accurate positioning of the FIB pattern relative to the pre-patterned devices and minimal drift during the writing phase. Various fabrication parameters that mimic process variability can be studied and the obtained experimental results compared with numerical simulations of the fabricated devices. This allows the calibration of the simulation models for more accurate design to manufacturing predictability. As a proof of concept, the experimental optimization of the localized modes in a photonic molecule formed by placing two one-dimensional photonic crystal cavities on a nanowire coupler is reported. The effects of different photonic crystal geometry, material removal depth and rate, sidewall profile and roughness, patterning drift on the performance of the photonic molecule resonator are investigated. These fabricated photonic molecule devices can be used as refractive index sensors with measured sensitivities on the order of 400 nm/RIU with a sensing volume as low as 18 femtoliters. The dimensions of the fabricated devices and the understanding of their optical behavior on environmental influence open the door for near-field optical spectroscopy of single bacterial specimens.

Citation Download Citation

Jaime Viegas and Peng Xing "Rapid prototyping of coupled photonic cavities by focused ion beam/photolithography hybrid technique", Proc. SPIE 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII, 89740H (7 March 2014); https://doi.org/10.1117/12.2040270

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available