Phase retrieval for optical metrology

Giancarlo Pedrini; Ahmad Faridian; Alok Kumar Singh; Wolfgang Osten

doi:10.1117/12.2071038

13 November 2014 Phase retrieval for optical metrology

Giancarlo Pedrini, Ahmad Faridian, Alok Kumar Singh, Wolfgang Osten

Proceedings Volume 9276, Optical Metrology and Inspection for Industrial Applications III; 927602 (2014) https://doi.org/10.1117/12.2071038
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Phase retrieval methods have useful applications for optical imaging, metrology and 3D reconstruction. One such technique to recover the phase of the object wavefront is digital holography. In this paper we will show applications of digital holographic techniques for the time resolved measurement of deformation of microelectromechanical systems (MEMS) and for determination of residual stresses. Furthermore digital holography can be used for the investigations of microscopic samples and its resolution can be increased by using short wavelength and oblique illumination. We will see as well that dark-field digital holographic microscopy can be used to visualize biological specimens. A phase retrieval methods, which does not use a reference wave is also described in the last part of the paper.

Citation Download Citation

Giancarlo Pedrini, Ahmad Faridian, Alok Kumar Singh, and Wolfgang Osten "Phase retrieval for optical metrology", Proc. SPIE 9276, Optical Metrology and Inspection for Industrial Applications III, 927602 (13 November 2014); https://doi.org/10.1117/12.2071038

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