Acoustic high-frequency effects inside the package of capacitive silicon microphones and their impact on the device performance

G. Schrag; T. Kuenzig; D. Pham; C. Glacer; A. Dehé; G. Wachutka

doi:10.1117/12.2179888

21 May 2015 Acoustic high-frequency effects inside the package of capacitive silicon microphones and their impact on the device performance

G. Schrag, T. Kuenzig, D. Pham, C. Glacer, A. Dehé, G. Wachutka

Author Affiliations +

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170M (2015) https://doi.org/10.1117/12.2179888
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

We present investigations on acoustic effects occurring inside the sound port of capacitive silicon microphones, which exert additional frequency-dependent damping forces on the sensing membrane and, thus, affect the overall performance of the microphone. Extensive FE simulations have been carried out in order to study the airflow inside the package, to identify relevant impact factors, and to optimize an existing acoustic network model intended for implementation in a fully coupled, multi-energy domain system-level model of the device.

Citation Download Citation

G. Schrag, T. Kuenzig, D. Pham, C. Glacer, A. Dehé, and G. Wachutka "Acoustic high-frequency effects inside the package of capacitive silicon microphones and their impact on the device performance", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170M (21 May 2015); https://doi.org/10.1117/12.2179888

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available