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2 March 2012 Metrological scanning probe microscope based on a quartz tuning fork detector
Bakir Babic, Chris H. Freund, Jan Herrmann, Malcolm A. Lawn, John Miles
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Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 1, 011003 (March 2012). https://doi.org/10.1117/1.JMM.11.1.011003
Abstract
We give an overview of the design of a metrological scanning probe microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the implementation of key components. The mSPM is being developed as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the International System of Units (SI) meter at NMIA. The instrument is based on a quartz tuning fork (QTF) detector and will provide a measurement volume of 100  μm × 100  μm × 25  μm with a target uncertainty of 1 nm for the position measurement. Characterization results of the nanopositioning stage and the QTF detector are presented along with an outline of the method for tip mounting on the QTFs. Initial imaging results are also presented.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2012/$25.00 © 2012 SPIE
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Bakir Babic, Chris H. Freund, Jan Herrmann, Malcolm A. Lawn, and John Miles "Metrological scanning probe microscope based on a quartz tuning fork detector," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 011003 (2 March 2012). https://doi.org/10.1117/1.JMM.11.1.011003
Published: 2 March 2012
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KEYWORDS
Metrology
Sensors
Atomic force microscopy
Quartz
Scanning probe microscopes
Frequency modulation
Scanning probe microscopy
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