Special Section Guest Editorial: Advanced Fabrication of MEMS and Photonic Devices

Georg von Freymann; Mary Ann Maher

doi:10.1117/1.JMM.12.4.041201

16 December 2013 Special Section Guest Editorial: Advanced Fabrication of MEMS and Photonic Devices

Georg von Freymann, Mary Ann Maher

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 4, 041201 (December 2013). https://doi.org/10.1117/1.JMM.12.4.041201

Abstract

Technologies for fabrication of MEMS, optics and photonics at the micro- and nanoscale continue to advance and diversify due to rising demands for miniaturization, cost reduction, functional integration, and increased performance. Examples include diffractive optics, sub-wavelength optics, microrefractive optics, optical waveguides, photonic crystals, plasmonic devices, and heterogeneously integrated active and passive micro- and nano-optical devices. These devices are playing increasing roles in a wide range of applications, including sensors and actuators, communications, imaging, biomedical, data storage, and other areas. Both conventional and unconventional micro- and nanofabrication techniques serve as fundamental enablers for wide ranges of MEMS and passive and active optical components and devices.

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Georg von Freymann and Mary Ann Maher "Special Section Guest Editorial: Advanced Fabrication of MEMS and Photonic Devices," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(4), 041201 (16 December 2013). https://doi.org/10.1117/1.JMM.12.4.041201

Published: 16 December 2013

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