Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths

Kyo Sang Choi; Deok Su Kim; Hee June Yang; Min Soo Ryu; Ji Sung Chae; Sung Pil Chang

doi:10.1117/1.JMM.14.2.025001

9 April 2015 Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths

Kyo Sang Choi, Deok Su Kim, Hee June Yang, Min Soo Ryu, Ji Sung Chae, Sung Pil Chang

Author Affiliations +
Kyo Sang Choi,¹ Deok Su Kim,¹ Hee June Yang,¹ Min Soo Ryu,¹ Ji Sung Chae,¹ Sung Pil Chang¹

¹Inha Univ. (Korea, Republic of)

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 2, 025001 (April 2015). https://doi.org/10.1117/1.JMM.14.2.025001

ARTICLE

FIGURES & TABLES

REFERENCES

CITED BY

Google Scholar citations

Citing works

DOWNLOAD PAPER SAVE TO MY LIBRARY

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password
Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?
Show

Keep me signed in

No SPIE account? Create an account

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

Abstract

This paper describes the design, fabrication, and characterization of a capacitive humidity sensor with water vapor inlet holes of different depths. The humidity sensors were composed of a SiO₂ insulation layer, a bottom electrode, a polyimide (PI) sensing layer, and a top electrode containing water vapor inlet holes. The sensors were 3.5 mm×3.5 mm with a 0.7-μm thick PI-based sensing layer. A humidity sensor with a partially etched PI layer in the water vapor inlet holes had the following characteristics: sensitivity 1500 fF/%RH, hysteresis 0.37%, and a response time of 70 s.

© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE) 1932-5150/2015/$25.00 © 2015 SPIE

Citation Download Citation

Kyo Sang Choi, Deok Su Kim, Hee June Yang, Min Soo Ryu, Ji Sung Chae, and Sung Pil Chang "Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025001 (9 April 2015). https://doi.org/10.1117/1.JMM.14.2.025001

Published: 9 April 2015

ACCESS THE FULL ARTICLE

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password
Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $24.00

Non-members: $28.00 ADD TO CART

JOURNAL ARTICLE
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

CITATIONS
Cited by 4 scholarly publications.

Explore citations on Lens.org

Advertisement

Advertisement

RIGHTS & PERMISSIONS
Get copyright permission

KEYWORDS

Sensors

Humidity

Electrodes

Dielectrics

Etching

Capacitance

Photoresist materials

Microelectromechanical systems

Double patterning technology

Manufacturing

Show All Keywords

RELATED CONTENT

Research and development of capacitive transducer with linear acceleration
Proceedings of SPIE (May 21 2015)

Novel dielectric elastomer sensors for compression load detection
Proceedings of SPIE (March 08 2014)

Dielectric elastomer strain and pressure sensing enable reactive soft fluidic...
Proceedings of SPIE (April 15 2016)

ANSYS simulation of the microaccelerometer sensor
Proceedings of SPIE (March 15 2019)

Simulation and optimization of a micromachined gyroscope using high aspect...
Proceedings of SPIE (November 19 2001)

A linearly tunable capacitor fabricated by the post-CMOS process
Proceedings of SPIE (July 01 2005)

Characterization and reliability of CMOS microstructures
Proceedings of SPIE (August 18 1999)

Subscribe to Digital Library

Receive Erratum Email Alert

Erratum Email Alerts notify you when an article has been updated or the paper is withdrawn.

Visit My Account to manage your email alerts.

The alert successfully saved.

Visit My Account to manage your email alerts.

The alert did not successfully save. Please try again later.

Kyo Sang Choi, Deok Su Kim, Hee June Yang, Min Soo Ryu, Ji Sung Chae, Sung Pil Chang, "Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths," J. Micro/Nanolith. MEMS MOEMS 14(2) 025001 (9 April 2015) https://doi.org/10.1117/1.JMM.14.2.025001

Include:

Citation Only

Citation & Abstract

Format:

RIS

EndNote

BibTex

Show All Keywords

Keywords/Phrases

Search In:

Publication Years