Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

Chun Zhou; Tsuyoshi Kurosawa; Takahiro Dazai; Jan Doise; Jiaxing Ren; Cody Bezik; Tamar Segal-Peretz; Roel Gronheid; Paulina Rincon-Delgadillo; Akiyoshi Yamazaki; Juan de Pablo; Paul F. Nealey

doi:10.1117/1.JMM.17.3.031203

22 August 2018 Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

Chun Zhou, Tsuyoshi Kurosawa, Takahiro Dazai, Jan Doise, Jiaxing Ren, Cody Bezik, Tamar Segal-Peretz, Roel Gronheid, Paulina Rincon-Delgadillo, Akiyoshi Yamazaki, Juan de Pablo, Paul F. Nealey

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 17, Issue 3, 031203 (August 2018). https://doi.org/10.1117/1.JMM.17.3.031203

Abstract

Acquiring three-dimensional (3-D) information becomes increasingly important for the development of block copolymer (BCP) directed self-assembly (DSA) lithography, as two-dimensional imaging is no longer sufficient to describe the 3-D nature of DSA morphology and probe hidden structures under the surface. Using the post-DSA membrane fabrication technique and scanning transmission electron microscopy tomography, we were able to characterize the 3-D structures of BCP in graphoepitaxial DSA hole shrink process. Different DSA structures of singlets formed in templated holes with different surface chemistry and geometry were successfully captured and their 3-D shapes were reconstructed from tomography data. The results reveal that strong polystyrene-preferential sidewalls are necessary to create vertical DSA cylinders and that template size outside of process window could result in defective DSA results in 3-D. Our study as well as the established 3-D metrology would greatly help to develop a fundamental understanding of the key DSA factors for optimizing the graphoepitaxial hole shrink process.

Citation Download Citation

Chun Zhou, Tsuyoshi Kurosawa, Takahiro Dazai, Jan Doise, Jiaxing Ren, Cody Bezik, Tamar Segal-Peretz, Roel Gronheid, Paulina Rincon-Delgadillo, Akiyoshi Yamazaki, Juan de Pablo, and Paul F. Nealey "Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions," Journal of Micro/Nanolithography, MEMS, and MOEMS 17(3), 031203 (22 August 2018). https://doi.org/10.1117/1.JMM.17.3.031203

Received: 29 April 2018; Accepted: 17 July 2018; Published: 22 August 2018

ACCESS THE FULL ARTICLE

JOURNAL ARTICLE
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY