Quasicommon-path digital holographic microscopy with phase aberration compensation based on a long-working distance objective

Jianglei Di; Kaiqiang Wang; Jiwei Zhang; Chaojie Ma; Teli Xi; Ying Li; Kun Wei; Weijuan Qu; Jianlin Zhao

doi:10.1117/1.OE.57.2.024108

23 February 2018 Quasicommon-path digital holographic microscopy with phase aberration compensation based on a long-working distance objective

Jianglei Di, Kaiqiang Wang, Jiwei Zhang, Chaojie Ma, Teli Xi, Ying Li, Kun Wei, Weijuan Qu, Jianlin Zhao

Author Affiliations +

Optical Engineering, Vol. 57, Issue 2, 024108 (February 2018). https://doi.org/10.1117/1.OE.57.2.024108

Abstract

We present a quasicommon-path digital holographic microscopy with phase aberration compensation, which is based on a long-working distance objective and can be used for the quantitative characterization of microstructure specimens. The quasicommon-path arrangement makes the holographic system very compact and stable. Meanwhile, the object and reference beams all travel along the same path, which can effectively eliminate the system aberration, and the mirror in the reference arm can be adjusted precisely for the phase tilt compensation. In the experiment, a wafer with orderly patterns and unified height of 180 nm is measured, and its three-dimensional surface topography is obtained. A long-term system stability of 1.39 nm is achieved in measurement with the proposed method.

Citation Download Citation

Jianglei Di, Kaiqiang Wang, Jiwei Zhang, Chaojie Ma, Teli Xi, Ying Li, Kun Wei, Weijuan Qu, and Jianlin Zhao "Quasicommon-path digital holographic microscopy with phase aberration compensation based on a long-working distance objective," Optical Engineering 57(2), 024108 (23 February 2018). https://doi.org/10.1117/1.OE.57.2.024108

Received: 1 December 2017; Accepted: 30 January 2018; Published: 23 February 2018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $24.00

Non-members: $28.00 ADD TO CART

JOURNAL ARTICLE
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Digital holography

Holograms

Holography

Mirrors

Objectives

Microscopy

Semiconducting wafers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years