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Akira Mori
General Manager at KELK Ltd
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Author
Publications (2)
Proceedings Article | 25 February 2009 Paper
Micro ID marking for semiconductor chips: recent progress and future prospects
Yoshiaki Kokushi, Yoshinori Saitou, Akira Mori
Proceedings Volume 7202, 72020N (2009) https://doi.org/10.1117/12.808503
KEYWORDS: Semiconducting wafers, Silicon, Semiconductor lasers, Laser marking, Semiconductors, Silicon films, Oxides, Pulsed laser operation, Particles, Laser irradiation
Proceedings Article | 6 November 2000 Paper
Micropeak array in the scribe line on a wafer
Teiichirou Chiba, Ryuusuke Komura, Akira Mori
Proceedings Volume 4088, (2000) https://doi.org/10.1117/12.405734
KEYWORDS: Oxides, Silicon, Laser marking, Semiconducting wafers, Silicon films, Laser irradiation, Semiconductor lasers, Photomasks, Scanning electron microscopy, Second-harmonic generation
Conference Committee Involvement (1)
Laser-based Micro- and Nanopackaging and Assembly IV
27 January 2010 | San Francisco, California, United States
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