Alexandria McKinlay
at Applied NanoTools Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 March 2023 Presentation + Paper
Proceedings Volume 12424, 1242404 (2023) https://doi.org/10.1117/12.2647576
KEYWORDS: Silicon nitride, Photonic integrated circuits, Fabrication, Prototyping, Electron beam lithography, Silicon, Waveguides

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