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Dr. Amir Ahmad Saghiri
R&D Scientist at TRIOPTICS GmbH
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Publications (1)
Proceedings Article | 23 January 2006 Paper
SU-8 multiple layer structuring by means of maskless photolithography (DWL66)
Amir Saghiri, Matthias Kaden, Konrad Rössler, Roel Wijnaendts, Sven Preuss, Alexander Forozan
Proceedings Volume 6110, 611003 (2006) https://doi.org/10.1117/12.643777
KEYWORDS: Stereolithography, Bragg cells, Lenses, Photoresist materials, Coating, Optical lithography, Absorption, Quartz, Computer aided design, Multilayers
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