Dr. Andrew S. Holmes Profile

Dr. Andrew S. Holmes

at Imperial College

SPIE Involvement:

Author

Proceedings Article | 7 March 2014 Paper

Mechanically amplified MEMS optical accelerometer with FPI readout

Edward Davies, David George, Andrew Holmes

Proceedings Volume 8977, 89770Z (2014) https://doi.org/10.1117/12.2040022

KEYWORDS: Mirrors, Calibration, Silicon, Optical fibers, Near infrared, Microelectromechanical systems, Finite element methods, Transducers, Photodiodes, Data acquisition

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Proceedings Article | 26 May 2011 Paper

Diffractive elements manufactured by grey tone mask and global laser lightning for transportation applications

F. Quentel, K. Boehlen, J. Fieret, A. Holmes, P. Meyrueis, V. Raulot

Proceedings Volume 8026, 80260Q (2011) https://doi.org/10.1117/12.886537

KEYWORDS: Diffractive optical elements, Halftones, Laser ablation, Manufacturing, Computer programming, Calibration, Computer generated holography, Diffraction, Modulation, Binary data

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Proceedings Article | 26 February 2008 Paper

Electrodeposition of Au for self-assembling 3D microstructures

M. Kiziroglou, A. Goswami Mukherjee, R. Moseley, P. Taylor, S. Pranonsatit, A. Holmes, E. Yeatman

Proceedings Volume 6882, 68820B (2008) https://doi.org/10.1117/12.763341

KEYWORDS: Gold, Tin, Copper, Nickel, Photoresist materials, Oxygen, Fabrication, Silicon, Scanning electron microscopy, Oxidation

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Proceedings Article | 26 February 2008 Paper

Pulsed laser ablation of polymers for display applications

James Pedder, Andrew Holmes, Heather Booth

Proceedings Volume 6879, 68790S (2008) https://doi.org/10.1117/12.778180

KEYWORDS: Laser ablation, Micromachining, Lenses, Surface roughness, Polymers, Microlens array, Laser processing, Computer aided design, Pulsed laser operation, Binary data

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Proceedings Article | 26 February 2008 Paper

MEMS post-processing of MPW dies using BSOI carrier wafers

A. Goswami Mukherjee, M. Kiziroglou, A. Holmes, E. Yeatman

Proceedings Volume 6882, 68820E (2008) https://doi.org/10.1117/12.763217

KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Etching, Gold, Metals, Deep reactive ion etching, Dysprosium, Photoresist materials, Electroplating, Plating

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Proceedings Article | 13 March 2007 Paper

Pulsed laser processing of shallow micro-optical structures

J. Pedder, A. Holmes

Proceedings Volume 6458, 645818 (2007) https://doi.org/10.1117/12.708116

KEYWORDS: Laser ablation, Photomasks, Surface roughness, Photoresist materials, Laser processing, Lithography, Excimer lasers, Pulsed laser operation, Calibration, Ultraviolet radiation

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Proceedings Article | 7 March 2007 Paper

Pulsed laser ablation for volume fabrication of micro-optical arrays on large-area substrates

J. Pedder, A. Holmes, Ric Allott, Karl Boehlen

Proceedings Volume 6462, 64620W (2007) https://doi.org/10.1117/12.700235

KEYWORDS: Laser ablation, Photomasks, Surface roughness, Halftones, Excimer lasers, Diamond turning, Laser development, Micromachining, Ultraviolet radiation, Polymers

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Proceedings Article | 7 June 2006 Paper

Advanced laser micromachining processes for MEMS and optical applications

Andrew Holmes, James Pedder, Karl Boehlen

Proceedings Volume 6261, 62611E (2006) https://doi.org/10.1117/12.682929

KEYWORDS: Micromachining, Laser ablation, Microelectromechanical systems, Surface finishing, Excimer lasers, Photomasks, Critical dimension metrology, Polishing, Radium, Computer aided design

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Proceedings Article | 1 March 2006 Paper

A study of angular dependence in the ablation rate of polymers by nanosecond pulses

James Pedder, Andrew Holmes

Proceedings Volume 6106, 61061B (2006) https://doi.org/10.1117/12.659793

KEYWORDS: Laser ablation, Data modeling, Polymers, Excimer lasers, Etching, Solids, Photoresist materials, Wave propagation, Microelectromechanical systems, Optical lithography

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Proceedings Article | 12 April 2005 Paper

Modeling of solid-state and excimer laser processes for 3D micromachining

Andrew Holmes, Alexander Onischenko, David George, James Pedder

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.600632

KEYWORDS: Laser ablation, Excimer lasers, Micromachining, Pulsed laser operation, Etching, Optical simulations, Calibration, Solid state lasers, 3D modeling, Computer aided design

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Proceedings Article | 15 July 2004 Paper

Efficient pocketing simulation model for solid state laser micromachining and its application to a sol-gel material

Alexander Onischenko, David George, Andrew Holmes, Frank Otte

Proceedings Volume 5339, (2004) https://doi.org/10.1117/12.531356

KEYWORDS: Laser ablation, Modeling, Sol-gels, Thermal effects, Optical simulations, Computer aided design, Micromachining, Calibration, Computer simulations, Diode pumped solid state lasers

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Proceedings Article | 18 November 2003 Paper

Laser profiling of 3D microturbine blades

Andrew Holmes, Mark Heaton, Guodong Hong, Keith Pullen, Phil Rumsby

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.540733

KEYWORDS: Micromachining, Excimer lasers, Laser ablation, Photomasks, Scanning electron microscopy, Ultraviolet radiation, Profiling, Silicon, Polymers, Lithography

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Proceedings Article | 17 October 2003 Paper

CAD/CAM software for an industrial laser manufacturing tool

Ines Stassen Boehlen, Jim Fieret, Andrew Holmes, Kin Lee

Proceedings Volume 4977, (2003) https://doi.org/10.1117/12.479533

KEYWORDS: Laser ablation, Head, Software development, Optical simulations, Laser cutting, Scanners, Laser scanners, Micromachining, Rapid manufacturing, 3D scanning

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Proceedings Article | 25 February 2002 Paper

Laser processes for MEMS manufacture

Andrew Holmes

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456807

KEYWORDS: Microelectromechanical systems, Micromachining, Excimer lasers, Laser ablation, Ultraviolet radiation, Lithography, Laser processing, Polymers, Metals, Nickel

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Proceedings Article | 29 June 2001 Paper

Laser fabrication and assembly processes for MEMS

Andrew Holmes

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432522

KEYWORDS: Microelectromechanical systems, Micromachining, Polymers, Laser processing, Excimer lasers, Silicon, Laser applications, Laser ablation, Manufacturing, Etching

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Proceedings Article | 29 June 2001 Paper

Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks

Francois Quentel, Jim Fieret, Andrew Holmes, Sylvain Paineau

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432538

KEYWORDS: Photomasks, Laser ablation, Diffractive optical elements, Halftones, Excimer lasers, Computer generated holography, Calibration, Diffraction, Polymers, Manufacturing

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