Ann Opdebeeck
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 April 2023 Poster + Presentation + Paper
Lilach Choona, Jasmine Linshiz, Shaul Pres, Boris Levant, Noam Tal, Gaetano Santoro, Sylvain Baudot, Ann Opdebeeck, Jason Reifsnider, Senthil Vadakupudhu Palayam, Gian Lorusso, Jerome Mitard, Shay Yogev
Proceedings Volume 12496, 124960Q (2023) https://doi.org/10.1117/12.2658294
KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Transistors, Image processing, Etching, Performance modeling, Deep learning, Overlay metrology, Image segmentation

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