Dr. Badariah Bais Profile

Dr. Badariah Bais

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Publications (2)

Proceedings Article | 1 July 2005 Paper

A low-g bulk micromachined silicon accelerometer with area-changed differential capacitance

Badariah Bais, Ali Ahanchian, Yeop Majlis Burhanuddin

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608050

KEYWORDS: Capacitance, Silicon, Electrodes, Bulk micromachining, Wafer bonding, Glasses, Capacitors, Device simulation, Microelectromechanical systems, Optical lithography

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Proceedings Article | 2 April 2004 Paper

Area-changed capacitive accelerometer using 3-mask fabrication process

Yeop Burhanuddin, Bais Badariah, Agus Tamsir

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.523631

KEYWORDS: Electrodes, Silicon, Capacitance, Deep reactive ion etching, Semiconducting wafers, Wafer bonding, Optical lithography, Reactive ion etching, Microelectromechanical systems, Glasses

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