Dr. Benjamin Strahm Profile

Dr. Benjamin Strahm

at Ecole Polytechnique Fédérale de Lausanne

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Publications (2)

Proceedings Article | 21 August 2009 Paper

Optical emission spectroscopy to diagnose powder formation in SiH4-H2 discharges

B. Strahm, A. Feltrin, R. Bartlome, C. Ballif

Proceedings Volume 7409, 74090E (2009) https://doi.org/10.1117/12.825797

KEYWORDS: Silicon, Emission spectroscopy, Plasma, Hydrogen, Atmospheric particles, Silicon films, Optics manufacturing, Particles, Ions, Diagnostics

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Proceedings Article | 21 August 2009 Paper

Study of the microstructure transition width from amorphous to microcrystalline silicon as a function of the input silane concentration

B. Strahm, A. Feltrin, G. Bugnon, F. Meillaud-Sculati, C. Ballif, A. Howling, Ch. Hollenstein

Proceedings Volume 7409, 74090I (2009) https://doi.org/10.1117/12.825799

KEYWORDS: Microcrystalline materials, Silicon, Plasmas, Crystals, Silicon films, Photovoltaics, Plasma enhanced chemical vapor deposition, Hydrogen, Thin films, Amorphous silicon

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