Dr. Ma Bin Profile

Dr. Ma Bin

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Publications (4)

Proceedings Article | 21 November 2014 Paper

Design of beam expander for 90-nm lithography tool

Han Xing, Li Lin, Ma Bin

Proceedings Volume 9296, 92960N (2014) https://doi.org/10.1117/12.2067855

KEYWORDS: Lithography, Lithographic illumination, Prisms, Beam expanders, Laser sources, Lithium, Reflection, Optical design, Optical simulations, Telescopes

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Proceedings Article | 31 December 2013 Paper

Off-axis illumination of lithography tool

Han Xing, Li Lin, Ma Bin

Proceedings Volume 9042, 90420U (2013) https://doi.org/10.1117/12.2034891

KEYWORDS: Lithographic illumination, Lithography, Diffractive optical elements, Diffraction, Axicons, Photomasks, Image quality, Ions, Optics manufacturing, Very large scale integration

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Proceedings Article | 10 November 2010 Paper

Different illumination modes in microlithography illumination system

Xing Han, Lin Li, Yifan Huang, Bin Ma, Baolin Du

Proceedings Volume 7849, 78490N (2010) https://doi.org/10.1117/12.868805

KEYWORDS: Lithographic illumination, Lithography, Photomasks, Visualization, Staring arrays, Optical lithography, Zemax, Analytical research, Spherical lenses, Deep ultraviolet

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Proceedings Article | 22 October 2010 Paper

Application and influence of aspheric surfaces in lithographic objectives design

Bin Ma, Lin Li, Yifan Huang, Chang Jun, Baolin Du, Xing Han

Proceedings Volume 7657, 76570A (2010) https://doi.org/10.1117/12.866022

KEYWORDS: Monochromatic aberrations, Aspheric lenses, Lithography, Distortion, Spherical lenses, Wavefronts, Objectives, Modulation transfer functions, Manufacturing, Resolution enhancement technologies

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