Dr. Bo Wu
at Beijing Univ of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 August 2023 Paper
Jiayang Xie, Liangchen Hu, Bo Wu, Pan Fu, Yiyang Xie
Proceedings Volume 12781, 127812Z (2023) https://doi.org/10.1117/12.2686767
KEYWORDS: Etching, Gallium arsenide, Silica, Optical spheres, Vacuum chambers, Interfaces, Silicon, Oxides, Corrosion, Plasma

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