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Carly Rogan
at Intel Corp
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Publications (1)
Proceedings Article | 10 April 2024 Presentation
Nanoscale molecular analysis with nano-projectile SIMS
Michael Eller, Brandon Holybee, Dmitriy Verkhoturov, Michael Shaw, Stanislav Verkhoturov, Blake Bluestein, Morgan Hazelbaker, Carly Rogan, Serge Della-Negra, James Blackwell, Emile Schweikert
Proceedings Volume 12955, 1295509 (2024) https://doi.org/10.1117/12.3011750
KEYWORDS: Silicon, Ions, Extreme ultraviolet, Chemical analysis, Ultraviolet radiation, Spectroscopy, Semiconductors, Photoacid generators, Photo decomposable quencher, Mass spectrometry
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