Mr. Chieh-Miao Chang Profile

Chieh-Miao Chang

at imec

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Study of EUV stochastic defect on wafer yield

Yi-Pei Tsai, Chieh-Miao Chang, Yi-Han Chang, Apoorva Oak, Darko Trivkovic, Ryoung-Han Kim

Proceedings Volume 12954, 1295404 (2024) https://doi.org/10.1117/12.3010858

KEYWORDS: Stochastic processes, Extreme ultraviolet, Semiconducting wafers, Data modeling, Photomasks, Critical dimension metrology, Optical lithography, Back end of line, Inspection, Extreme ultraviolet lithography

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