For many maskshops, designed parallel mask data preparation (MDP) flows accompanying with a final data comparison
are viewed as a reliable method that could reduce quality risks caused by mis-operation. However, in recent years, more
and more mask data mistakes have shown that present parallel MDP flows could not capture all mask data errors yet. In
this paper, we will show major failure models of parallel MDP flows from analyzing MDP quality accidents and share
our approaches to achieve further improvement with mask suppliers together.
For those wafer fabs that have no their own maskshops, the main target of mask quality department is to gain stable mask
quality performance through effective supplier management, and therefore achieves competitive business results. After
dealing with lots of mask data preparation (MDP) quality problems with suppliers, we have found that incomplete
change management procedures are one of major sources that induce incorrect mask data for writing. This article will
share our experience in how to enhance change management flows with mask suppliers together and will also show the
utility after a series of flow improvement actions.
In semiconductor industry, many wafer fabs acquire masks from qualified suppliers because they do not have in-house
maskshops. Under the circumstances, for these fabs, their main objectives of mask supplier management are to carry out
gaining stable quality performance with punctual delivery and acceptable prices. At present, interests in mask supplier
management are launching into mask data preparation (MDP) field when it's beginning to face raised challenges to
output correct results all the time. These incoming tasks are mainly due to increasingly complicated MDP demand from
wafer fabs for implementing various approaches on masks and tape-out to support wafer production and tight cycle-time
control. In this paper, it shows major factors of MDP quality issues from analyzing past accidents in our suppliers and
proposes possible approaches for achieving further improvement.
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