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Da Bai Jiang
at GLOBALFOUNDRIES Singapore
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Publications (1)
Proceedings Article | 20 April 2011 Paper
Study of scanner stage vibration by using scatterometry
Dabai Jiang, Wenzhan Zhou, Michael Hsieh, Qunying Lin
Proceedings Volume 7971, 79711V (2011) https://doi.org/10.1117/12.879342
KEYWORDS: Scanners, Scatterometry, Critical dimension metrology, Semiconducting wafers, Data modeling, Scatter measurement, Lithography, Reticles, Image quality, Process modeling
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