Dr. Darren L. Forman
Principal Scientist at Nutronics, Inc.
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | 12 March 2019
JM3, Vol. 18, Issue 01, 013505, (March 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.1.013505
KEYWORDS: Photoresist materials, Line edge roughness, Optical lithography, Lithography, Diffraction, Nanoimprint lithography, Photoresist developing, Electron beam lithography, Deep ultraviolet, Near field optics

Proceedings Article | 28 March 2014 Paper
Proceedings Volume 9049, 90491W (2014) https://doi.org/10.1117/12.2063254
KEYWORDS: Lithography, Camera shutters, Super resolution, Ultraviolet radiation, Point spread functions, Bragg cells, Modulation, Optical alignment, Cameras, Relays

Proceedings Article | 8 February 2012 Paper
Darren Forman, Gerrit Heuvelman, Robert McLeod
Proceedings Volume 8249, 824904 (2012) https://doi.org/10.1117/12.908512
KEYWORDS: Super resolution, Lithography, Polymerization, Photoresist materials, FT-IR spectroscopy, Photochemistry, Polymers, Ultraviolet radiation, Stimulated emission depletion microscopy, Absorption

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 61521X (2006) https://doi.org/10.1117/12.656515
KEYWORDS: Scatterometry, Dielectrics, Atomic force microscopy, Etching, Critical dimension metrology, Metals, Semiconducting wafers, Back end of line, Optical properties, Metrology

Proceedings Article | 24 March 2006 Paper
Darren Forman, Mike Littau, Christopher Raymond, Steven Hummel
Proceedings Volume 6152, 61524D (2006) https://doi.org/10.1117/12.656615
KEYWORDS: Scatterometry, Critical dimension metrology, Photomasks, Lithography, Photoresist materials, Scatter measurement, Diffraction gratings, Diffraction, Data modeling, Nano opto mechanical systems

Proceedings Article | 24 March 2006 Paper
Mike Littau, Darren Forman, Josh Bruce, Christopher Raymond, Steven Hummel
Proceedings Volume 6152, 615236 (2006) https://doi.org/10.1117/12.656729
KEYWORDS: Diffraction, Polarization, Scatterometry, Critical dimension metrology, Metrology, Analytical research, Measurement devices, Etching, Light scattering, Semiconductors

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 61521I (2006) https://doi.org/10.1117/12.656466
KEYWORDS: Scatterometry, Domes, Scatter measurement, Silicon, Clouds, Polarization, Diffraction, Atomic force microscopy, Critical dimension metrology, Semiconductors

Proceedings Article | 24 August 2005 Paper
Senthil Annamalai, Philip Dowd, Darren Forman, Petros Varangis, Tom Tumolillo, Allen Gray, Kathy Sun, Mingguo Liu, Joe Campbell, Daniel Carothers, Sanjay Krishna
Proceedings Volume 5897, 58970P (2005) https://doi.org/10.1117/12.617775
KEYWORDS: Staring arrays, Sensors, Long wavelength infrared, Quantum dots, Thermography, Infrared radiation, Gallium arsenide, Mid-IR, Infrared sensors, Quantum well infrared photodetectors

Showing 5 of 8 publications
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