Dr. David Grojo Profile

Dr. David Grojo

at Aix-Marseille Univ.

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Publications (1)

Proceedings Article | 20 June 2024 Presentation + Paper

Axicon-lens-doublet focusing for the fabrication of ultra-high-aspect-ratio structures through silicon with infrared ultrafast lasers

Niladri Ganguly, Pol Sopeña, David Grojo

Proceedings Volume 13005, 130050L (2024) https://doi.org/10.1117/12.3017566

KEYWORDS: Beam shaping, Laser processing, Semiconductor manufacturing, Silicon, Ultrafast phenomena, Infrared radiation, Infrared imaging, Fabrication, Laser irradiation, Axicons, Ultrafast lasers

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