Dr. Dipti Naphade
at King Abdullah Univ. of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12054, PC120540N (2022) https://doi.org/10.1117/12.2613455
KEYWORDS: Electrodes, Metals, Nanolithography, Lithography, Silicon, Photomasks, Manufacturing, Luminescence, Extreme ultraviolet lithography, Etching

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