Dr. Dmitry A. Belousov Profile

Dr. Dmitry A. Belousov

at Institute of Automation and Electrometry of the SB RAS

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Author

Publications (8)

Proceedings Article | 27 November 2023 Poster + Paper

Thermochemical laser writing of silicide masks on dual-layer films a-Si/Cr

Dmitrij Belousov, Roman Kuts, Victor Korolkov

Proceedings Volume 12762, 127620W (2023) https://doi.org/10.1117/12.2687545

KEYWORDS: Chromium, Silicon, Etching, Reflectivity, Silicon films, Multiphoton lithography, Laser applications, Film thickness, Amorphous silicon, Computer generated holography, Diffractive optical elements, Direct write lithography, Nanostructured thin films, Laser microstructuring

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Proceedings Article | 19 December 2022 Poster + Presentation + Paper

Analyzing the tolerances on direct laser writing of two-dimensional Dammann gratings and performing the software correction of writing modes

Victor Korolkov, Andrey Sedukhin, Roman Kuts, Vadim Cherkashin, Sergey Golubtsov, Anatoly Malyshev, Dmitrij Belousov

Proceedings Volume 12318, 123182G (2022) https://doi.org/10.1117/12.2643720

KEYWORDS: Photoresist materials, Diffraction, Tolerancing, Diffraction gratings, Multiphoton lithography, Photomasks, Statistical analysis, Process control, Glasses, Distortion

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Proceedings Article | 9 October 2021 Poster + Paper

Sectorized variable duty cycle f/1 diffractive transmission sphere for compensation of negative diffractive effects

Victor Korolkov, Ruslan Nasyrov, Andrey Sedukhin, Dmitry Belousov, Roman Kuts

Proceedings Volume 11895, 118951D (2021) https://doi.org/10.1117/12.2604810

KEYWORDS: Diffraction, Reflection, Polarization, Etching, Interferometry, Optical spheres, Computer simulations

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Proceedings Article | 9 October 2021 Poster + Paper

Development of methods for the formation and control of a given distribution of the photoresist thickness for conformal correctors fabrication

Victor Korolkov, Ruslan Nasyrov, Vladimir Khomutov, Dmitry Belousov, Roman Kutz

Proceedings Volume 11895, 118951J (2021) https://doi.org/10.1117/12.2604808

KEYWORDS: Photoresist materials, Optical components, Spectroscopy, Diffraction, Reflectance spectroscopy, Reflectometry, Profilometers, High power lasers, Etching

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Proceedings Article | 9 October 2021 Poster + Paper

Diffraction method for estimation of positioning errors that occurred during the writing of computer-generated holograms

Ruslan Shimansky, Victor Korolkov, Dmitrij Belousov, Roman Kuts

Proceedings Volume 11895, 118951B (2021) https://doi.org/10.1117/12.2604292

KEYWORDS: Computer generated holography, Diffraction, Error analysis, Diffraction gratings, Wavefronts, Laser systems engineering, Mathematical modeling, Laser beam diagnostics, Holograms, Reliability

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Proceedings Article | 12 September 2021 Presentation + Paper

Usage of dry processes for the formation of diffractive structures on Ti and Ti/Si films

Viktor Korolkov, Roman Kuts, Anatoly Malyshev, Dmitry Belousov, Aleksey Matochkin

Proceedings Volume 11873, 1187307 (2021) https://doi.org/10.1117/12.2597162

KEYWORDS: Titanium, Silicon, Reactive ion etching, Oxidation, Etching, Silicon films, Oxides, Annealing, Reflection, Silica

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Proceedings Article | 12 September 2021 Presentation + Paper

Controlling the accuracy of fabricating computer-generated holograms on circular and X-Y laser writing systems

Ruslan Shimansky, Dmitrij Belousov, Roman Kuts, Victor Korolkov

Proceedings Volume 11871, 118710I (2021) https://doi.org/10.1117/12.2597134

KEYWORDS: Computer generated holography, Diffraction, Laser systems engineering, Diffraction gratings, Error analysis, Wavefronts, Chromium, Diffractive optical elements, Control systems

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Proceedings Article | 12 September 2021 Presentation + Paper

Development of method for measuring a light energy distribution over foci for mould of diffractive component of bifocal intraocular lens

V. Korolkov, P. Konoshenko, S. Mikerin, D. Belousov, A. Malyshev, S. Golubtsov

Proceedings Volume 11873, 118730G (2021) https://doi.org/10.1117/12.2597112

KEYWORDS: Refractive index, Photoresist materials, Diffraction, Silica, Liquids, Diffractive optical elements, Manufacturing, Intraocular lenses, Eye, Polymers

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Showing 5 of 8 publications

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