CONFERENCE PROCEEDINGS
Advanced Search
Eric M. Felkel
Senior Engineer at Chroma Technology
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 5 March 2021 Open Access Presentation
Zygo Corporation: Measure small aspheres & freeforms with ZYGO's 3D, non-contact COMPASS
Proceedings Volume 11716, 117162J (2021) https://doi.org/10.1117/12.2596084
Proceedings Article | 16 August 2004 Paper
Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy
Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.546211
KEYWORDS: Microelectromechanical systems, Microscopy, Microopto electromechanical systems, Metrology, Thin films, Interferometry, Ferroelectric materials, Microscopes, Optical microscopy, Defect detection
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top