Francis Santerre
at IBM Canada Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 March 2019 Presentation + Paper
Proceedings Volume 10905, 109050D (2019) https://doi.org/10.1117/12.2504649
KEYWORDS: Back end of line, Liquids, Silicon, Pulsed laser operation, Mathematical modeling, Laser ablation, Laser processing, Semiconductor lasers, Interfaces, Thin films

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