Dr. Frank Cerio
at Veeco Instruments Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 September 2019 Paper
Narasimhan Srinivasan, Katrina Rook, Paul Turner, Tania Henry, Kenji Yamamoto, Devlin Donnelly, Thu Van Nguyen, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devahasayam
Proceedings Volume 11147, 111470N (2019) https://doi.org/10.1117/12.2536935
KEYWORDS: Silicon, Molybdenum, Multilayers, Extreme ultraviolet, Atomic force microscopy, Photomasks, Surface roughness, Ion beams, Reflectivity, Interfaces

Proceedings Article | 26 March 2019 Presentation + Paper
Narasimhan Srinivasan, Katrina Rook, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devasahayam
Proceedings Volume 10957, 109570O (2019) https://doi.org/10.1117/12.2515098
KEYWORDS: Etching, Ion beams, Photomasks, Extreme ultraviolet, Nickel, Optical lithography, Ruthenium, Critical dimension metrology, Ions, Cobalt

Proceedings Article | 3 October 2018 Presentation + Paper
Katrina Rook, Meng Lee, Narasimhan Srinivasan, Vincent Ip, Sandeep Kohli, Mathew Levoso, Frank Cerio, Adrian Devasahayam
Proceedings Volume 10809, 108090F (2018) https://doi.org/10.1117/12.2501832
KEYWORDS: Etching, Ruthenium, Nickel, Ion beams, Extreme ultraviolet, Photomasks, Optical lithography, Ions, Photoresist materials, Multilayers

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