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Fu-Tien Wong
at Taiwan Semiconductor Manufacturing Co Ltd
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Publications (4)
Proceedings Article | 24 April 2003 Paper
Microlens design for compact lens system
Hung-Jen Hsu, Fu-Tien Weng, Chih-Kung Chang, Yu-Kung Hsiao
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.501330
KEYWORDS: Optical filters, CMOS sensors, Copper indium disulfide, Quantum efficiency, Lens design, Image sensors, Microlens, Diodes, Semiconductor manufacturing, Smart sensors
Proceedings Article | 24 April 2003 Paper
Matching different size masks to effectively improve stepper throughput
Fu-Tien Weng, Hung-Jen Hsu, Chih-Kung Chang, Yu-Kung Hsiao
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.501442
KEYWORDS: Microelectromechanical systems, Actuators, Optical filters, Reticles, Photomasks, Dysprosium, Semiconductor manufacturing, Optical alignment, Semiconducting wafers, Smart sensors
Proceedings Article | 23 April 2001 Paper
New novel method for solving ASML alignment fail (model error) in color filter process
Fu-Tien Weng, Chung-Sheng Hsiung, Yu-Kung Hsiao, Sheng-Liang Pang, Kuo-Liang Lu
Proceedings Volume 4406, (2001) https://doi.org/10.1117/12.425276
KEYWORDS: Optical filters, Contamination, Phase modulation, Sensors, Data transmission, Transmittance, Optical alignment, Semiconducting wafers, Failure analysis, Systems modeling
Proceedings Article | 8 June 1998 Paper
Nitride film surface properties to reduce nitride residue
Fu-Tien Weng, Chih-Hsiung Lee, Kuo-Liang Lu, Yeong-Pey Chyn
Proceedings Volume 3332, (1998) https://doi.org/10.1117/12.308782
KEYWORDS: Oxides, Water, Particles, Manufacturing, Photoresist materials, Surface properties, Very large scale integration, Lutetium, Chlorine, Yield improvement
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