Mr. Fumiya Kaneko Profile

Fumiya Kaneko

at Nihon Entegris KK

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 25 March 2019 Paper

Filter technology developments to address defectivity in leading-edge photoresists

T. Kohyama, F. Kaneko, K. Miura, A. Gjoka, J. Jaber

Proceedings Volume 10960, 109601X (2019) https://doi.org/10.1117/12.2514974

KEYWORDS: Photoresist materials, Particles, Manufacturing, Metals, Adsorption, Filtering (signal processing), Optical lithography, Chemistry, Lithography, Extreme ultraviolet lithography

Read Abstract +

Proceedings Article | 25 March 2019 Paper

Bridging the defect gap in EUV photoresist

T. Kohyama, Fumiya Kaneko, Alketa Gjoka, Jad Jaber

Proceedings Volume 10960, 109601V (2019) https://doi.org/10.1117/12.2514969

KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, Polymers, Optical lithography, Yield improvement, Bridges, Photons, Photoresist developing, High volume manufacturing, Lithography

Read Abstract +

Proceedings Article | 27 March 2017 Paper

Development of novel purifiers with appropriate functional groups based on solvent polarities at bulk filtration

Tetsu Kohyama, Fumiya Kaneko, Saksatha Ly, James Hamzik, Jad Jaber, Yoshiaki Yamada

Proceedings Volume 10146, 101461J (2017) https://doi.org/10.1117/12.2257388

KEYWORDS: Metals, Polymers, Manufacturing, Contamination, Process control, Surface plasmons, Lithography, Potassium, Chemical reactions, Iron, Adsorption

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years