Dr. Gai Zhigang Profile

Dr. Gai Zhigang

at Qilu Univ of Technology

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Publications (1)

Proceedings Article | 20 June 2023 Paper

Research on platinum film resistance temperature sensing method

Cunbao Huang, Fengxiang Guo, Wei Sun, Xu Chai, Xueyu Zhang, Shousheng Liu, Guangsen Xia, Zhigang Gai

Proceedings Volume 12715, 127150J (2023) https://doi.org/10.1117/12.2682543

KEYWORDS: Platinum, Resistance, Resistors, Temperature metrology, Calibration, Photoresist materials, Sputter deposition, Magnetrons, Lithography, Temperature sensors

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