Metamaterials has become a hot research field in recent years due to its unique artificial electromagnetic proper- ties. It has the potential to realize high-performance temperature sensors because its resonance features are highly dependent on the surrounding environment. In this paper, we designed a metamaterial sensor with two-layer grating structure and studied the relationship between its resonance dip and the incident angle of electromagnetic wave. By fixing the incident angle at a proper value, we realized a highly sensitive temperature sensor. The measured temperature sensitivity and limit of detection are about 0.766%/°C and 0.154°C, respectively.
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