Dr. Gene E. Ice Profile

Dr. Gene E. Ice

Corporate Fellow/Division Director at Oak Ridge National Lab

SPIE Involvement:

Author

Proceedings Article | 28 September 2011 Paper

Nested KB mirror fabrication for synchrotron hard x-ray nanofocusing

Bing Shi, Wenjun Liu, Jun Qian, Chian Liu, Ruben Khachatryan, Michael Wieczorek, Ali Khounsary, Albert Macrander, Paul Zschack, Jonathan Tischler, Gene Ice, Lahsen Assoufid

Proceedings Volume 8139, 813903 (2011) https://doi.org/10.1117/12.894101

KEYWORDS: Mirrors, Coating, Polishing, Surface finishing, Hard x-rays, X-rays, Synchrotrons, Platinum, Surface roughness, X-ray optics

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Proceedings Article | 4 September 2009 Paper

Nested mirrors for x-rays and neutrons

Gene Ice, Rozaliya Barabash, Ali Khounsary

Proceedings Volume 7448, 74480B (2009) https://doi.org/10.1117/12.831078

KEYWORDS: Mirrors, X-rays, X-ray optics, Diffraction, Geometrical optics, X-ray diffraction, Reflection, Surface finishing, Reflectivity, Polishing

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Proceedings Article | 3 September 2008 Paper

Multilayers and crystal for a multi-bandpass monochromator

Renfei Feng, Yuriy Platonov, David Broadway, Gene Ice, Andrea Gerson, Stewart McIntyre

Proceedings Volume 7077, 70771Y (2008) https://doi.org/10.1117/12.806344

KEYWORDS: Crystals, Reflectivity, Monochromators, Multilayers, X-rays, Light sources, Diffraction, Laser crystals, Molybdenum, Atomic force microscopy

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Proceedings Article | 29 December 2003 Paper

At the limit of nondispersive micro- and nanofocusing mirror optics

Gene Ice, Eliot Specht, Jonathan Tischler, Ali Khounsary, Lahsen Assoufid, Chian Liu

Proceedings Volume 5347, (2003) https://doi.org/10.1117/12.533345

KEYWORDS: Mirrors, X-rays, Diffraction, Surface finishing, Hard x-rays, Polishing, Coating, X-ray optics, Particles, X-ray diffraction

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SPIE Journal Paper | 1 December 2003

Profile coating and its application for Kirkpatrick-Baez mirrors

Chian Liu, Lahsen Assoufid, Ray Conley, Albert Macrander, Gene Ice, Jonathan Tischler

OE, Vol. 42, Issue 12, (December 2003) https://doi.org/10.1117/12.10.1117/1.1625381

KEYWORDS: Mirrors, Coating, Gold, X-rays, Silicon, Polishing, Surface finishing, Metrology, Optical engineering, Spherical lenses

Proceedings Article | 24 December 2002 Paper

Mirrors for nanofocusing x-ray beams

Ali Khounsary, Gene Ice, Peter Eng

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.455687

KEYWORDS: Mirrors, X-rays, Diffraction, Spherical lenses, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Surface finishing, Polishing, EUV optics

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Proceedings Article | 24 December 2002 Paper

Profile coating of KB mirror applications at the Advanced Photon Source

Chian Liu, L. Assoufid, Albert Macrander, Gene Ice, J. Tischler

Proceedings Volume 4782, (2002) https://doi.org/10.1117/12.456298

KEYWORDS: Mirrors, Coating, Gold, X-rays, Silicon, Photomasks, Polishing, Metrology, X-ray optics, Semiconducting wafers

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For microfocusing x-ray mirrors, an ellipse shape is desirable for aberration-free optics. However, it is difficult to polish elliptical mirrors to x-ray quality smoothness. A differential coating method to convert a cylindrical mirror to an elliptical one has been previously reported The differential coating was obtained by varying the sputter source power while the mirror was passed through. Here we report a new method of profile coating to achieve the same goal more effectively. In the profile coating, the sputter source power is kept constant, while the substrate is passed over a contoured mask at a constant speed. The mask is placed very close to the substrate level (within 1.0 mm) on a shield-can over the sputter gun. Four-inch-diameter Si wafers were coated through a 100-mm-long by 152-mm-wide aperture on the top of the shield-can. The thickness distribution was then obtained using a spectroscopic ellipsometer with computer-controlled X-Y translation stages. A model has been developed to fit the measured thickness distribution of stationary growth. The relative thickness weightings are then digitized at every point 1 mm apart for the entire open area of the aperture. When the substrate is moving across the shield-can during a deposition, the film thickness is directly proportional to the length of the opening on the can along the moving direction. By equating the summation of relative weighting to the required relative thickness at the same position, the length of the opening at that position can be determined. By repeating the same process for the whole length of the required profile, a contour can be obtained for a desired thickness profile. The contoured mask is then placed on the opening of the shield-can. The number of passes and the moving speed of the substrate are determined according to the required thickness and the growth-rate calibration. The mirror coating profile is determined from the ideal surface figure of a focus ellipse and that obtained from a long trace profiler on the substrate. Preliminary test results using Au as a coating material are presented.

Proceedings Article | 22 November 1996 Paper

Monochromators for small cross-section x-ray beams from high heat flux synchrotron sources

Gene Ice, Bernie Riemer, Ali Khounsary

Proceedings Volume 2856, (1996) https://doi.org/10.1117/12.259879

KEYWORDS: Crystals, X-rays, Monochromators, Laser crystals, Silicon, Diffraction, X-ray diffraction, Crystallography, Heat flux, Distortion

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Proceedings Article | 22 November 1996 Paper

Controlling gravitational distortions in long synchrotron x-ray mirrors

Gene Ice

Proceedings Volume 2856, (1996) https://doi.org/10.1117/12.259868

KEYWORDS: Mirrors, X-rays, Silicon, Synchrotrons, Laser scattering, Scattering, Information operations, Synchrotron radiation, Glasses, Collimation

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Proceedings Article | 21 November 1996 Paper

Monochromators for small-cross-section x-ray beams from high heat flux synchrotron sources

Gene Ice, Bernie Riemer, Ali Khounsary

Proceedings Volume 2855, (1996) https://doi.org/10.1117/12.259833

KEYWORDS: Crystals, X-rays, Monochromators, Laser crystals, Silicon, Diffraction, X-ray diffraction, Crystallography, Heat flux, Distortion

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Proceedings Article | 20 January 1993 Paper

Sagittal crystal focusing of undulator radiation with high-heat-load inclined crystals

Gene Ice, Cullie Sparks

Proceedings Volume 1740, (1993) https://doi.org/10.1117/12.138701

KEYWORDS: Crystals, Laser crystals, Monochromators, Crystallography, Scattering, X-rays, Synchrotron radiation, Laser scattering, Mirrors, Ray tracing

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Showing 5 of 11 publications

Conference Committee Involvement (2)

Advances in X-Ray/EUV Optics, Components, and Applications

14 August 2006 | San Diego, California, United States

X-Ray Optics: The Roadmap for the Next 10 Years

31 July 2005 | San Diego, California, United States

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