Prof. Giovanna Brusatin
at Univ degli Studi di Padova
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 3 January 2019 Paper
L. Mezi, S. Bollanti, S. Botti, G. Brusatin, L. Businaro, G. Della Giustina, P. Di Lazzaro, M. Fagnoni, F. Flora, A. Gerardino, D. Murra, S. Protti, A. Torre, E. Torti
Proceedings Volume 11042, 110420Z (2019) https://doi.org/10.1117/12.2522469
KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

Proceedings Article | 27 March 2017 Paper
Proceedings Volume 10146, 101461F (2017) https://doi.org/10.1117/12.2258215
KEYWORDS: Chemical analysis, Extreme ultraviolet lithography, X-rays, Photoresist materials, Absorption, X-ray lithography, Electron beam lithography, Materials science, Photoresist processing, Photoresist technology, Lithography, Extreme ultraviolet, Silicon, Photons

Proceedings Article | 28 August 2015 Presentation + Paper
Enrico Gazzola, Michela Cittadini, Laura Brigo, Giovanna Brusatin, Massimo Guglielmi, Filippo Romanato, Alessandro Martucci
Proceedings Volume 9547, 95471D (2015) https://doi.org/10.1117/12.2186662
KEYWORDS: Hydrogen, Terahertz radiation, Plasmonics, Refractive index, Sensors, Electrons, Reflectivity, Surface plasmons, Gases, Titanium dioxide

Proceedings Article | 10 September 2014 Paper
Proceedings Volume 9161, 91610B (2014) https://doi.org/10.1117/12.2066677
KEYWORDS: Lithography, Sol-gels, Photomasks, Resistance, Silicon, Scanning electron microscopy, Active optics, Nanostructures, Molecules, Optical lithography

Proceedings Article | 3 May 2013 Paper
Fabio Frassetto, Stefano Bonora, Giovanna Brusatin, Gioia Della Giustina, Salvatore Stagira, Caterina Vozzi, Erika Zanchetta, Luca Poletto
Proceedings Volume 8778, 87780C (2013) https://doi.org/10.1117/12.2019980
KEYWORDS: Diffraction gratings, Monochromators, Ultrafast phenomena, Extreme ultraviolet, Mirrors, Diffraction, Spherical lenses, Optical design, Vignetting, Interferometers

Showing 5 of 14 publications
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