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Glen P. Callahan
Sales Manager, Eastern at SCHOTT North America Inc
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Publications (2)
Proceedings Article | 7 April 1999 Paper
Characteristics of deep-UV optics at 193 nm and 157 nm
Glen Callahan, Bruce Flint
Proceedings Volume 3578, (1999) https://doi.org/10.1117/12.344438
KEYWORDS: Deep ultraviolet, Optical coatings, Reflectivity, Thin film coatings, Silica, Antireflective coatings, Optical components, Mirrors, Excimer lasers, Absorption
Proceedings Article | 31 March 1997 Paper
UV and gas interactions in an enclosed 193-nm excimer laser beamline
David Elliot, Jonathan Camp, Warren Harlow, Victor Dosoretz, Daniel Behr, Glen Callahan, Scott Flint
Proceedings Volume 2992, (1997) https://doi.org/10.1117/12.270099
KEYWORDS: Ozone, Mirrors, Ultraviolet radiation, Excimer lasers, Coating, Absorption, Laser optics, Pulsed laser operation, Sensors, Semiconducting wafers
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