Goki Arai
at Utsunomiya Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 July 2015 Paper
Proceedings Volume 9658, 96581A (2015) https://doi.org/10.1117/12.2192188
KEYWORDS: Extreme ultraviolet, Laser energy, Plasma, Tin, Pulsed laser operation, Picosecond phenomena, Metrology, Photomasks, Inspection, Nd:YAG lasers

Proceedings Article | 9 July 2015 Paper
Proceedings Volume 9658, 96581B (2015) https://doi.org/10.1117/12.2192194
KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Tin, Ions, Picosecond phenomena, Tellurium, Opacity, Optical simulations, Numerical simulations

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