Prof. Haeryung Kim Profile

Prof. Haeryung Kim

at Tongmyong Univ of Information Technology

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Publications (2)

Proceedings Article | 12 April 2013 Paper

Adjustment of image decomposition mode and reflection criterion focusing on critical dimension uniformity and exposure dose effectiveness under diffraction effects in optical microlithography using a digital micromirror device

Manseung Seo, Haeryung Kim

Proceedings Volume 8683, 86830X (2013) https://doi.org/10.1117/12.2011428

KEYWORDS: Digital micromirror devices, Lithography, Imaging arrays, Gaussian beams, Diffraction, Mirrors, Optical lithography, Beam shaping, Photomasks, Aspheric lenses

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Proceedings Article | 26 November 2012 Paper

Parameters affecting pattern fidelity and line edge roughness under diffraction effects in optical maskless lithography using a digital micromirror device

Manseung Seo, Taehyoung Lee, Haeryung Kim

Proceedings Volume 8557, 855724 (2012) https://doi.org/10.1117/12.2000855

KEYWORDS: Lithography, Diffraction, Digital micromirror devices, Micromirrors, Line edge roughness, Gaussian beams, Maskless lithography, Imaging arrays, Photomasks, Binary data

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