CONFERENCE PROCEEDINGS
Advanced Search
Hamed Alemansour
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 23 March 2020 Paper
A new approach to removing H atoms in hydrogen depassivation lithography
S. O. Reza Moheimani, Hamed Alemansour
Proceedings Volume 11324, 113240Y (2020) https://doi.org/10.1117/12.2552138
KEYWORDS: Hydrogen, Lithography, Chemical species, Scanning tunneling microscopy, Silicon, Electrons, Feedback control, Imaging systems, Switching, Quantum communications
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top