Dr. Harutaka Mekaru Profile

Dr. Harutaka Mekaru

at AIST

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Author

Publications (6)

SPIE Journal Paper | 1 July 2009

Demonstration of fabricating a needle array by the combination of x-ray grayscale mask with the lithografie, galvanoformung, abformung process

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 8, Issue 03, 033010, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158617

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

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Proceedings Article | 9 January 2008 Paper

A novel fabrication method of needle array combined x-ray gray mask with LIGA process

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 6800, 68001R (2008) https://doi.org/10.1117/12.753858

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, X-ray technology, Nickel, Scanning electron microscopy, Photoresist processing, Etching

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SPIE Journal Paper | 1 January 2008

Fabrication and evaluation of a grayscale mask for x-ray lithography using MEMS technology

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 7, Issue 01, 013009, (January 2008) https://doi.org/10.1117/12.10.1117/1.2894817

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Proceedings Article | 21 March 2007 Paper

Three-dimensional X-ray lithography using a silicon mask with inclined absorbers

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 6517, 651735 (2007) https://doi.org/10.1117/12.711824

KEYWORDS: X-rays, X-ray lithography, Photomasks, Silicon, Polymethylmethacrylate, Scanning electron microscopy, X-ray technology, Etching, Microelectromechanical systems, X-ray imaging

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Proceedings Article | 13 June 2006 Paper

Recent development of micropore optics using MEMS technologies

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita, Kazuhisa Mitsuda, Yoshitaka Ishisaki, Akio Hoshino, Zhen Yang, Takayuki Takano, Harutaka Mekaru, Ryutaro Maeda

Proceedings Volume 6266, 62661B (2006) https://doi.org/10.1117/12.670736

KEYWORDS: Silicon, Semiconducting wafers, Etching, Microelectromechanical systems, X-rays, X-ray optics, Wafer-level optics, Mirrors, Optics manufacturing, Oxides

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Proceedings Article | 16 November 1999 Paper

Energy and polarization control in synchrotron-radiation-stimulated nanoprocess

Tsuneo Urisu, Harutaka Mekaru, Takayuki Miyamae, Shinya Hirano, Hideyuki Noda

Proceedings Volume 3773, (1999) https://doi.org/10.1117/12.370106

KEYWORDS: Scanning tunneling microscopy, Aluminum, Silicon, Oxides, Monochromators, Etching, Synchrotron radiation, Polarization control, Mirrors, Chemical species

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Showing 5 of 6 publications

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